伍文杰，男，18luck新利电竞 物理学院教师，Micromachines 客座编辑，自然科学基金委函评专家，IOP Trusted Reviewer, 2019年获批18luck新利电竞 副研究员专业技术职务任职资格，近五年作为负责人主持国家重点研发计划子课题、自然科学基金面上项目、自然科学基金青年基金、中国博士后特别资助（站中）、中国博士后科学基金等项目。长期从事高端MEMS加速度传感芯片及其应用研究，成功研制亚ng分辨率MEMS加速度、重力传感芯片及仪器。仪器性能国际同类领先，已进入实用化阶段。相关研究成果在Microsystems & Nanoengineering, JMEMS, SNA等业内主流期刊发表SCI学术论文26篇，申请发明专利18项。在研课题包括亚ng分辨率高精度MEMS加速度计芯片设计、工艺与系统集成，MEMS相对重力仪芯片设计、工艺、集成与数据融合，基于人工智能的MEMS传感器结构优化设计，无人机载智能化大地测量方法。2022年指导学生获18luck新利电竞 本科生优秀毕业设计、优秀毕业生、荣誉学士学位。

代表性论文：(* 为通讯作者）

1.      Dandan Liu, Wenjie Wu*, Shitao Yan, Qiangwei Xu, Yuanlei Wang, Huafeng Liu, Liangcheng Tu*． In-Situ Compensation on Temperature Coefficient of the Scale Factor for a Single-Axis Nano-g Force-Balance MEMS Accelerometer[J]. IEEE Sensors Journal, 2021, 21(18): 19872-19880.

2.    Wenjie Wu, Dandan Liu, Huafeng Liu, Shitao Yan, Shihao Tang, Jinquan Liu, Fangjing Hu , Ji Fan, and Liangcheng Tu*. Measurement of Tidal Tilt by a Micromechanical Inertial Sensor Employing Quasi-Zero- Stiffness Mechanism[J]. Journal of Microelectromechanical Systems, 2020, 29(5): 1322-1331.

3.      Dandan Liu ,Huafeng Liu ,Jinquan Liu, Fangjing Hu, Ji Fan, Wenjie Wu*, and Liangcheng Tu*. Temperature Gradient Method for Alleviating Bonding-Induced Warpage in a High-Precision Capacitive MEMS Accelerometer[J]. Sensors, 2020, 20(4): 1186.

4.      Shitao Yan, Huafeng Liu, Qiangwei Xu, Dandan Liu, Mengqi Zhang, Wenjie Wu*, Liangcheng Tu*. A Method for Improving Out-of-plane Robustness of an Area-changed Capacitive Displacement Transducer Used in a Micro-accelerometer[J]. Sensors and Actuators A: Physical, 2020: 112156.

5.    Wenjie Wu, Dandan Liu, Wenrui Qiu, Huafeng Liu, Fangjing Hu, Ji Fan*, Chenyuan Hu* and Liangcheng Tu*. A precise spacing-control method in MEMS packaging for capacitive accelerometer applications[J]. Journal of Micromechanics and Microengineering, 2018, 28(12): 125016-24.

6.    Wenjie Wu, Jinquan Liu, Ji Fan, Danhua Peng, Huafeng Liu, Liangcheng Tu*. A nano-g micromachined seismic sensor for levelling-free measurements[J]. Sensors and Actuators A: Physical, 2018, 280: 238-244.

7.    Wenjie Wu, Zhu Li, JinQuan Liu, Ji Fan and LiangCheng Tu*. A nano-g MEMS accelerometer for earthquake monitoring[C]// 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017：599-602.

8.    Wenjie Wu, Panpan Zheng, Jinquan Liu, Zhu Li, Ji Fan, Hufeng Liu and Liangcheng Tu*. High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer[J]. Sensors, 2017, 17(9): 2158-73.

9.    Wenjie Wu, Tao Zhu, Jinquan Liu, Ji Fan, and Liangcheng Tu*. Polyimide-damage-free, CMOS-compatible Removal of Polymer Residues from Deep Reactive Ion Etching Passivation[J]. Journal of Electronic Materials, 2015, 44(3): 991-8.

10. Shihao Tang, Huafeng Liu, Shitao Yan, Xiaochao Xu, Wenjie Wu, Ji Fan, Jinquan Liu, Chenyuan Hu and Liangcheng Tu. A high-sensitivity MEMS gravimeter with a large dynamic range[J]. Microsystems & nanoengineering, 2019, 5(1), 1-11.

代表性专利

1.      中国发明专利 伍文杰、蔡冰洋、高乐、涂良成，一种基于变面积梳齿电容的 MEMS 相对重力仪探头及重力仪，202210603702.3.

2.      中国发明专利 伍文杰、高乐、李方正、涂良成，基于双路错位阵列电容位移传感的MEMS重力仪探头及重力仪，202210623975.4.

3.      中国发明专利 伍文杰、涂良成、刘骅锋、刘丹丹，一种MEMS 准零刚度的弹簧振子结构，202010513743.4.

4.      中国发明专利，伍文杰、刘丹丹、刘金全、严世涛、涂良成，一种磁反馈闭环加速度传感器及其温度补偿方法，202010369114.9.