伍文杰   Associate professor

伍文杰,男,华中学者、18luck新利电竞 物理学院博导 、副教授,Microsystems & Nanoengineering (Nature子刊、一区) 青年编辑,Space Habitation青年编辑,IOP Trusted Reviewer,CGT2024组织委员会成员、专题负责人、召集人,光电子光子材料与器件学术会议学术委员,自然科学基金委函评专家。近五年作为负责人主持深地国家科技重大专项课题(4000万)、工信部高质量发展专项子课题(500万)、深地国家科技重大专项专题(300...Detials

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伍文杰,男,华中学者、18luck新利电竞 物理学院博导 、副教授,Microsystems & Nanoengineering (Nature子刊、一区) 青年编辑,Space Habitation青年编辑,IOP Trusted Reviewer,CGT2024组织委员会成员、专题负责人、召集人,光电子光子材料与器件学术会议学术委员,自然科学基金委函评专家。近五年作为负责人主持深地国家科技重大专项课题(4000万)、工信部高质量发展专项子课题(500万)深地国家科技重大专项专题(300万)国家重点研发计划子课题、自然科学基金面上项目、自然科学基金青年基金、中国博士后特别资助(站中)、中国博士后科学基金等项目。长期从事MEMS重力传感芯片及仪器、高精度MEMS加速度计研究。研发的小孔径MEMS井中重力仪(BMA-1)具有国内唯一性;台站式MEMS重力仪(SMA-1)、流动式MEMS重力仪(MA-1)、亚ng分辨率MEMS加速度计性能处于国际同类前列,已进入实用化阶段。相关研究成果在Microsystems & Nanoengineering, JMEMS, Measurement,SNA等业内主流期刊发表SCI学术论文40余篇,申请发明专利20余项(含2项美国专利)。指导学生获18luck新利电竞 本科生优秀毕业设计、优秀毕业生、荣誉学士学位、MINE青年学术沙龙卓越报告奖、CGU-2023优秀学生论文奖、CGT-2024优秀学生报告奖等。在研方向包括MEMS重力仪(台站、流动、井中、月球)、高端芯片设计、工艺、系统集成、数据融合、AI应用,无人机载智能化重力测量等。

常年招收优秀博士后、博士生、硕士生、进团队本科生:

团队宗旨:做真科学,研究真问题。培养学生具备发现问题、解决问题的能力,和学生共同成长、进步。

1、具有丰富的指导经验和国家级研究平台,可针对每位研究生实际情况制定个性化的科研能力培养方案,并给予国家重大项目锻炼机会!

2、专业背景与基础并不重要。MEMS是典型的交叉学科。欢迎有对科研感兴趣、有热情的同学加入!

3、MEMS传感器是智能工厂、AI机器人、智能驾驶等前沿产业的硬件核心。团队毕业研究生就业前景优良。目前所有毕业同学均获得华为offer!


代表性论文:(* 为通讯作者)

  1.       Dandan Liu, Fangzheng Li, Gangling Zhao, Le Gao, Bingyang Cai, Xun Wu, Maojun Peng, Wenjie Wu*, Liangcheng Tu*, Compensation of Temperature Effects in Force-Balanced Microelectromechanical System        Accelerometers,Measurement, 2024.

  2. Fangzheng Li , Dandan Liu , Le Gao, Bingyang Cai, Lujia Yang , Yuan Wang, Chun Zhao, Wenjie Wu*, and Liangcheng Tu, Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer, Journal of Microelectromechanical Systems, 2023Accepted.

  3.  Lujia Yang, Xiaochao Xu, Qian Wang, Ji’ao Tian, Yanyan Fang, Chun Zhao, Wenjie Wu*, Fangjing Hu* and Liangcheng Tu. A MEMS-Based Gravimeter for Simultaneous Vertical and Horizontal Earth Tides Measurements[C]//2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2023: 841-844.

  4.  Le Gao, Fangzheng Li, Jian Zhang, Bingyang Cai, Wenjie Wu*, and Liangcheng Tu*. A Force-Balance Capacitive MEMS Gravimeter with Superior Response Time, Self-Noise and Drift[C]//2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2023: 837-840.

  5.       高乐,张健,殷笑寒,伍文杰*.MEMS重力仪温度,倾斜和气压扰动影响机制及其抑制方法研究[J].18luck新利电竞 学报(自然科学版), 2023.

  6.  Dandan Liu, Wenjie Wu*, Shitao Yan, Qiangwei Xu, Yuanlei Wang, Huafeng Liu, Liangcheng Tu* In-Situ Compensation on Temperature Coefficient of the Scale Factor for a Single-Axis Nano-g Force-Balance MEMS Accelerometer[J]. IEEE Sensors Journal, 2021, 21(18): 19872-19880.

  7. Wenjie Wu, Dandan Liu, Huafeng Liu, Shitao Yan, Shihao Tang, Jinquan Liu, Fangjing Hu , Ji Fan, and Liangcheng Tu*. Measurement of Tidal Tilt by a Micromechanical Inertial Sensor Employing Quasi-Zero- Stiffness Mechanism[J]. Journal of Microelectromechanical Systems, 2020, 29(5): 1322-1331.

  8. Dandan Liu ,Huafeng Liu ,Jinquan Liu, Fangjing Hu, Ji Fan, Wenjie Wu*, and Liangcheng Tu*. Temperature Gradient Method for Alleviating Bonding-Induced Warpage in a High-Precision Capacitive MEMS Accelerometer[J]. Sensors, 2020, 20(4): 1186.

  9. Shitao Yan, Huafeng Liu, Qiangwei Xu, Dandan Liu, Mengqi Zhang, Wenjie Wu*, Liangcheng Tu*. A Method for Improving Out-of-plane Robustness of an Area-changed Capacitive Displacement Transducer Used in a Micro-accelerometer[J]. Sensors and Actuators A: Physical, 2020: 112156.

  10.  Wenjie Wu, Dandan Liu, Wenrui Qiu, Huafeng Liu, Fangjing Hu, Ji Fan*, Chenyuan Hu* and Liangcheng Tu*. A precise spacing-control method in MEMS packaging for capacitive accelerometer applications[J]. Journal of Micromechanics and Microengineering, 2018, 28(12): 125016-24.

  11. Wenjie Wu, Jinquan Liu, Ji Fan, Danhua Peng, Huafeng Liu, Liangcheng Tu*. A nano-g micromachined seismic sensor for levelling-free measurements[J]. Sensors and Actuators A: Physical, 2018, 280: 238-244.

  12. Wenjie Wu, Zhu Li, JinQuan Liu, Ji Fan and LiangCheng Tu*. A nano-g MEMS accelerometer for earthquake monitoring[C]// 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017599-602.

  13. Wenjie Wu, Panpan Zheng, Jinquan Liu, Zhu Li, Ji Fan, Hufeng Liu and Liangcheng Tu*. High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer[J]. Sensors, 2017, 17(9): 2158-73.

  14. Wenjie Wu, Tao Zhu, Jinquan Liu, Ji Fan, and Liangcheng Tu*. Polyimide-damage-free, CMOS-compatible Removal of Polymer Residues from Deep Reactive Ion Etching Passivation[J]. Journal of Electronic Materials, 2015, 44(3): 991-8.

  15. Shihao Tang, Huafeng Liu, Shitao Yan, Xiaochao Xu, Wenjie Wu, Ji Fan, Jinquan Liu, Chenyuan Hu and Liangcheng Tu. A high-sensitivity MEMS gravimeter with a large dynamic range[J]. Microsystems & nanoengineering, 2019, 5(1), 1-11.


部分代表性专利:

  1.       美国发明专利 伍文杰、蔡冰洋、高乐、王元蕾、涂良成,VARIABLE-AREA COMB CAPACITOR-BASED MEMS RELATIVE GRAVIMETER PROBE ANDGRAVIMETER, US11262474 B2

  2.          中国发明专利 伍文杰、方偲媛、詹韩雯钰,一种基于内外双层交错悬臂梁的 MEMS 惯性传感器微机械结构,202411359120.0.

  3.       中国发明专利 伍文杰、蔡冰洋、高乐、涂良成,一种基于变面积梳齿电容的 MEMS 相对重力仪探头及重力仪,202210603702.3.

  4. 中国发明专利 伍文杰、高乐、李方正、涂良成,基于双路错位阵列电容位移传感的MEMS重力仪探头及重力仪,202210623975.4.

  5.       中国发明专利 伍文杰、李方正、蔡冰洋、方偲媛、彭茂军、涂良成,一种高集成度MEMS相对重力仪, 2022116859043.

  6.       中国发明专利 伍文杰、李方正、高乐、蔡冰洋、涂良成,一种静电力平衡式MEMS加速度计及其闭环控制方法, 202310085393X.

  7. 中国发明专利 伍文杰、涂良成、刘骅锋、刘丹丹,一种MEMS 准零刚度的弹簧振子结构,202010513743.4.

  8. 中国发明专利 伍文杰、刘丹丹、刘金全、严世涛、涂良成,一种磁反馈闭环加速度传感器及其温度补偿方法202010369114.9.